A 10Gb/s photonic modulator and WDM MUX/DEMUX integrated with electronics in 0.13/spl mu/m SOI CMOS

Author

Huang, A. ; Gunn, Cary ; Guo-Liang Li ; Yi Liang ; Mirsaidi, Sina ; Narasimha, Adithyaram ; Pinguet, T.

Author_Institution

Luxtera, Carlsbad, CA

fYear

2006

fDate

6-9 Feb. 2006

Firstpage

922

Lastpage

929

Abstract

Monolithic integration of both photonic and electronic components operating at 10Gb/s in a 0.13mum SOI CMOS process for PowerPC processors is presented. A modulator uses free carrier plasma dispersion in a reverse-biased PIN optical phase shifter in a Mach-Zender interferometer. An AWG demultiplexer uses a forward-biased PIN phase shifter to compensate the optical path length improving the channel separation

Keywords

CMOS integrated circuits; Mach-Zehnder interferometers; demultiplexing equipment; modulators; multiplexing equipment; optical phase shifters; silicon-on-insulator; wavelength division multiplexing; 0.13 micron; 10 Gbit/s; AWG demultiplexer; Mach-Zender interferometer; PIN optical phase shifter; PowerPC processors; SOI CMOS; WDM; channel separation; electronic components; free carrier plasma dispersion; monolithic integration; photonic components; photonic modulator; CMOS process; Electronic components; Monolithic integrated circuits; Optical interferometry; Optical modulation; Phase modulation; Phase shifters; Phase shifting interferometry; Plasmas; Wavelength division multiplexing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Circuits Conference, 2006. ISSCC 2006. Digest of Technical Papers. IEEE International

Conference_Location

San Francisco, CA

ISSN

0193-6530

Print_ISBN

1-4244-0079-1

Type

conf

DOI

10.1109/ISSCC.2006.1696133

Filename

1696133