DocumentCode
2569570
Title
Modal parameter identification of a MEMS gyroscope
Author
M´Closkey, Robert T. ; Gibson, Steve ; Hui, Jason
Author_Institution
Dept. of Mech. & Aerosp. Eng., California Univ., Los Angeles, CA, USA
Volume
3
fYear
2000
fDate
2000
Firstpage
1699
Abstract
This paper reports the experimental system identification of the Jet Propulsion Laboratory microelectromechanical (MEMS) vibrational rate gyroscope. A high-order two-input/two-output transfer function for the microgyroscope is identified and mapped to a three-mode rigid plate model that reveals the orientation of important vibrational modes
Keywords
gyroscopes; microsensors; parameter estimation; transfer functions; vibration measurement; JPL; Jet Propulsion Laboratory MEMS vibrational rate gyroscope; MIMO transfer function; experimental system identification; high-order two-input/two-output transfer function; microelectromechanical vibrational rate gyroscope; microgyroscope; modal parameter identification; three-mode rigid plate model; vibrational mode orientation; Aerospace engineering; Calibration; Electrodes; Gyroscopes; Laboratories; Micromechanical devices; Microsensors; Parameter estimation; Propulsion; Transfer functions;
fLanguage
English
Publisher
ieee
Conference_Titel
American Control Conference, 2000. Proceedings of the 2000
Conference_Location
Chicago, IL
ISSN
0743-1619
Print_ISBN
0-7803-5519-9
Type
conf
DOI
10.1109/ACC.2000.879491
Filename
879491
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