Fabrication of Optical Waveguide Devices Using Electromagnetic Assisted Nanoimprinting

Author

Weng, Yung-Jin ; Weng, Yung-Chun ; Wong, Yong-Cheng ; Yang, Sen-Yeu ; Liu, Hsu-Kang

Author_Institution

Center for Gen. Educ., Kainan Univ., Taoyuan, Taiwan

fYear

2009

fDate

15-17 May 2009

Firstpage

910

Lastpage

912

Abstract

A creative technology was used in this research. Using the PDMS flexible mold magnetic powder method to transmit imprinting, and by combining the special characteristics of the soft lithography, polymethylmethacrylate (PMMA), and electromagnetic Plate uniform control pressing technology, researching the use of magnetic flexible mold imprinting technology to produce the optical waveguide devices, so as to allow the usage and the technology of micro hot embossing or nanoimprinting more mature.

Keywords

magnetic particles; nanolithography; optical waveguides; soft lithography; PDMS flexible mold magnetic powder method; electromagnetic Plate uniform control pressing technology; electromagnetic assisted nanoimprinting; optical waveguide devices; polymethylmethacrylate; soft lithography; Electromagnetic devices; Electromagnetic scattering; Electromagnetic waveguides; Magnetic devices; Nanoscale devices; Optical device fabrication; Optical devices; Optical waveguides; Powders; Soft lithography; Electromagnetic control technology; Nanoimprinting technolog; magnetic powder; magnetic- flexible mold; optical waveguide;

fLanguage

English

Publisher

ieee

Conference_Titel

2009 International Conference on Signal Processing Systems

Conference_Location

Singapore

Print_ISBN

978-0-7695-3654-5

Type

conf

DOI

10.1109/ICSPS.2009.179

Filename

5166923