DocumentCode :
2570094
Title :
Controlling the Optimize Deposition of Thin Film in D.C Plasma Magnetron Sputtering and Measuring the Surface Conductivity by Hall Effect
Author :
Bahadori, F. ; Mahmoudzadeh, Mahdi
Author_Institution :
Dept. of Plasma Phys., Middle East Tech. Univ., Ankara
fYear :
2005
fDate :
20-23 June 2005
Firstpage :
222
Lastpage :
222
Abstract :
Summary form only given. In our investigation, thin films of copper and brass were prepared by D.C. magnetron sputtering and coated on flat glasses. We have investigated the effects of their thicknesses on electrical and optical properties of the films. Also we have discussed on how we can control the rate of deposition in the set of D.C. plasma sputtering magnetron by controlling the beam and nanostructures. Then, we have measured the conductivity of the surfaces by Hall effect. So the results have shown that the resistivity of the thin films is a function of applied voltage. Moreover, we have shown that the decrease in resistivity by increasing the thickness is due to the increment in the carrier concentrations with increase in the thicknesses of films
Keywords :
Hall effect; brass; carrier density; copper; electrical resistivity; metallic thin films; plasma materials processing; sputter deposition; surface conductivity; Cu; CuZn; DC plasma magnetron sputtering; Hall effect; SiO2; carrier concentrations; electrical properties; nanostructures; optical properties; surface conductivity; thin film deposition; thin film resistivity; Conductivity measurement; Copper; Glass; Hall effect; Nanostructures; Optical films; Particle beams; Plasma measurements; Plasma properties; Sputtering;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science, 2005. ICOPS '05. IEEE Conference Record - Abstracts. IEEE International Conference on
Conference_Location :
Monterey, CA
ISSN :
0730-9244
Print_ISBN :
0-7803-9300-7
Type :
conf
DOI :
10.1109/PLASMA.2005.359273
Filename :
4198532
Link To Document :
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