A Novel Magnetic Nickel Mold Combined Nano-Particle Fluid Electromagnetism Imprinting on Replicating Microstructures

This study proposes a novel technology using nano-particle fluid electromagnetism to control the direct hot imprint resist of nickel mold. Combining the present gas-assisted nanoparticle hot imprint molding technology, electroforming technology, and self-designed heatable electromagnetic plate for even control and progressive pressuring technology, this study used electromagnetic nickel mold direct hot imprint to replicate micro structures, in order to make the molding technology and application of micro nanoimprint more mature. This study first used gas-assisted nanoparticle hot embossing method to replicate structures of microlens of original silicon molds on PC, so as to obtain complementary structural patterns. This PC film with structures of microlens is cast into nickel molds by electroforming. This nickel mold was used as the mold for magnetic embossing to imprint hot plastic PMMA.The result showed that through gas-assisted nanoparticle hot embossing molding, casting and component magnetic PDMS soft mold casting, molds of high costs and complicated production process can be massively replicated, and the replication precision is good. Hot gas embossing PDMS film and the surface of base materials can achieve even pressure and conformal contact, thus significantly improving the effective imprint area and imprintability. Through electroforming, casting duration of magnetic nickel molds can be shortened and costs can be effectively lowered. Moreover, electromagnetic plate was used to evenly control the direct hot pressure imprint resist, which is an advantage of the production process of micro structures.