Title :
Effect the Heat on the Growth Copper Film Sputtered on the Zinc Substrate in Different Conditions
Author :
Bahadori, F. ; Mahmoudzadeh, M.
Author_Institution :
Dept. of Plasma Phys., METU, Ankara
Abstract :
Summary form only given. In this paper we investigated the effect of high temperature on the growth of copper film on the zinc substrate in different conditions of variation of magnetic field and changing the gases. Then we also discussed the possibility of sputtering thin films in the optimum conditions
Keywords :
copper; metallic thin films; plasma materials processing; sputter deposition; Cu; Zn; copper film growth; high-temperature effect; magnetic field variation; thin film sputtering; zinc substrate; Argon; Atmospheric-pressure plasmas; Copper; Helium; Physics; Plasma applications; Plasma diagnostics; Plasma temperature; Substrates; Zinc;
Conference_Titel :
Plasma Science, 2005. ICOPS '05. IEEE Conference Record - Abstracts. IEEE International Conference on
Conference_Location :
Monterey, CA
Print_ISBN :
0-7803-9300-7
DOI :
10.1109/PLASMA.2005.359282
