Effect of the temperature on the performance of silicon micro-machined gyroscope using for rotating carrier

This paper reports the dependence of temperature and the performance, including scale factor, zero voltage, nonlinearity, sensitivity and stability of scale factor, of silicon micro-machined gyroscope, which is mainly used for rotating carrier´ s attitude determination, over the range -30 degree C to 70 degree C. The effects of temperature on the scale factor can be predicted theoretically that it has slight increases with the temperature increasing, which is in good agreement with the experimental results. Furthermore, the effect of the temperature on zero voltage, nonlinearity, sensitivity and stability of scale factor is also investigated through experiment under different temperature.