Title :
Tunability improvement of tunable capacitors using the finger patterned electrode
Author_Institution :
Mokpo Nat. Maritime Univ. (MMU), Mokpo, South Korea
Abstract :
In this work, tunable capacitors by enhancing fringe electric (E)-field in order to improve their tunability have been presented. Tunable capacitors were fabricated on a quartz substrate employing a low-loss and high-tunability para-ferro electric multi-layer thin film dielectric. Effects of finger patterns enhancing fringe electric-fields are analyzed in terms of effective capacitance and tunability, compared to the conventional tunable capacitors. At 25V and 3GHz, the maximum tunability of the finger-patterned capacitor with a line width of 2 μm is 38% that is 5.8% higher value than that of the convention one with the same electrode area.
Keywords :
MIM devices; dielectric thin films; electrodes; ferroelectric capacitors; ferroelectric thin films; quartz; finger patterned electrode; finger-patterned capacitor; frequency 3 GHz; fringe electric-field; para-ferroelectric multilayer thin film dielectric; quartz substrate; tunability improvement; voltage 25 V;
Conference_Titel :
Information and Communication Technology for the Muslim World (ICT4M), 2010 International Conference on
Conference_Location :
Jakarta
Print_ISBN :
978-1-4244-7920-7
Electronic_ISBN :
978-1-4244-7922-1
DOI :
10.1109/ICT4M.2010.5971910
