Development of simulation platform for the diffraction of periodic structures

Simulation platform for the diffraction of periodic structures is an important tool in the analysis and measurement of grating structures. In this work, a simulation platform based on Rigorous Coupled Wave Analysis (RCWA) method is developed to simulate diffraction problems of various grating structures. In order to get stable and accurate results, a simpler, more efficient formulation is proposed for cases in which only the reflected amplitudes or the transmitted amplitudes are required. This enhanced implementation of rigorous coupled-wave analysis can be successfully applied to transmission and reflection planar dielectric and absorption holographic gratings, or some more complex grating structures. As a professional simulation platform specially designed for grating structures, it´s capable to calculate the diffraction orders of arbitrarily shaped grating structures illuminated by different polarized wave. Moreover, some other algorithms can be flexibly introduced into this platform to extend its capability as well as applications.