Design optimization and improved performance on the link beam driven, miniaturized scanning mirror device

Author

Konno, Nobuaki ; Tsugai, Masahiro ; Yoshikawa, Eiji ; Usami, Teruo ; Fujita, Hiroyuki

Author_Institution

Ind. Electron. & Syst. Lab., Mitsubishi Electr. Corp., Hyogo, Japan

fYear

2000

fDate

2000

Firstpage

11

Lastpage

12

Abstract

Previously, we reported a silicon torsional resonant mirror driven by a PZT plate through link beam leverage effects and confirmed the device operation. Our device is mechanically reliable and stable since there are no metal leads on the vibrating silicon torsional beams and the mirror is supported by 6 beams. We present an improved device having much higher performance through both design and process optimization based on detailed FEM simulations and refinement of the fabrication process

Keywords

elemental semiconductors; finite element analysis; frequency response; micro-optics; micromachining; micromechanical resonators; mirrors; modal analysis; optical fabrication; optical scanners; optimisation; silicon; sputter etching; torsion; FEM simulation; ICP RIE; PZT plate driven; Si; cantilever beam; design optimization; fabrication process; frequency response; improved performance; link beam driven; link beam leverage; miniaturized scanning mirror device; modal response; process optimization; torsional resonant mirror; Ceramics; Design optimization; Fabrication; Frequency; Mirrors; Monitoring; Resonance; Silicon; Structural beams; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS, 2000 IEEE/LEOS International Conference on

Conference_Location

Kauai, HI

Print_ISBN

0-7803-6257-8

Type

conf

DOI

10.1109/OMEMS.2000.879603

Filename

879603