DocumentCode
2571281
Title
A new self-oscillation loop for MEMS vibratory gyroscopes
Author
Wang, Zhanfei ; Li, Zhihong ; Lu, Wengao
Author_Institution
Peking Univ., Beijing
fYear
2007
fDate
22-25 Oct. 2007
Firstpage
1046
Lastpage
1049
Abstract
In this paper we analyze self-oscillation loop for MEMS vibratory gyroscopes, present analytical equations for system design, and propose a new self-oscillation loop to improve stability of the drive control system and the recovery speed of oscillation amplitude after a shock.
Keywords
PI control; drives; gyroscopes; micromechanical devices; oscillations; stability; MEMS vibratory gyroscopes; PI controller; drive control system stability; self-oscillation loop; Control systems; Detectors; Electrostatic analysis; Equations; Force control; Force feedback; Gyroscopes; Micromechanical devices; Proportional control; Velocity control; AGC; MEMS; PI; Self-oscillation; gyroscope;
fLanguage
English
Publisher
ieee
Conference_Titel
ASIC, 2007. ASICON '07. 7th International Conference on
Conference_Location
Guilin
Print_ISBN
978-1-4244-1132-0
Electronic_ISBN
978-1-4244-1132-0
Type
conf
DOI
10.1109/ICASIC.2007.4415812
Filename
4415812
Link To Document