Title :
Multiple wavelength micromachined GaAlAs/GaAs vertical cavity filter array
Author :
Amano, Tetsuo ; Koyama, F. ; Nishiyama, N. ; Iga, K.
Author_Institution :
Microsyst. Res. Center, Tokyo Inst. of Technol., Yokohama, Japan
Abstract :
We propose a novel approach to wavelength stabilization and wavelength trimming in a multi-wavelength add/drop filter and VCSEL using a micromachined DBR mirror tuned by differential thermal expansion coefficients. We demonstrate a 2×2 multiple wavelength micromachined GaAlAs/GaAs filter array loaded with a GaAs wavelength control layer
Keywords :
III-V semiconductors; aluminium alloys; distributed Bragg reflector lasers; gallium arsenide; integrated optics; laser mirrors; micro-optics; micromachining; optical arrays; optical filters; semiconductor laser arrays; surface emitting lasers; wavelength division multiplexing; GaAlAs-GaAs; VCSEL; WDM; add/drop filter; differential thermal expansion coefficients; filter integration; micromachined DBR mirror; multiple wavelength micromachined filter; vertical cavity filter array; wavelength control layer; wavelength stabilization; wavelength trimming; Distributed Bragg reflectors; Etching; Gallium arsenide; Laser tuning; Optical arrays; Optical filters; Thickness control; Tunable circuits and devices; Vertical cavity surface emitting lasers; Wavelength division multiplexing;
Conference_Titel :
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-6257-8
DOI :
10.1109/OMEMS.2000.879608
