Dynamic deformation of scanning mirrors

Author

Conant, Robert A. ; Nee, Jocelyn T. ; Lau, Kam Y. ; Muller, Richard S.

Author_Institution

Berkeley Sensor & Actuator Center, California Univ., CA, USA

fYear

2000

fDate

2000

Firstpage

49

Lastpage

50

Abstract

Summary form only given. MEMS mirrors are capable of scanning at frequencies greater than 34 kHz. Both diffraction and dynamic deformation are dependent on the mirror size; increasing the mirror length decreases diffraction, but increases dynamic deformation. This paper presents an analytical formulation of mirror dynamic deformation for sinusoidally scanning rectangular mirrors, and measured data that corroborates the derived model. With this equation for dynamic deformation, we determine the optimal mirror size for a given scanning frequency, and the maximum achievable frequency of operation for a desired optical resolution

Keywords

deformation; light diffraction; micro-optics; micromechanical devices; mirrors; optical scanners; MEMS mirrors; analytical formulation; dynamic deformation; maximum achievable frequency; mirror dynamic deformation; mirror length; mirror size; optical resolution; optimal mirror size; scanning frequency; scanning mirrors; sinusoidally scanning rectangular mirrors; Acceleration; Adaptive optics; Degradation; Frequency; Mirrors; Optical diffraction; Optical distortion; Optical interferometry; Optical sensors; Optical surface waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS, 2000 IEEE/LEOS International Conference on

Conference_Location

Kauai, HI

Print_ISBN

0-7803-6257-8

Type

conf

DOI

10.1109/OMEMS.2000.879621

Filename

879621