High optical power handling of pop-up microelectromechanical mirrors

Author

Spahn, Olga Blum ; Tigges, Chris ; Shul, Randy ; Rodgers, Steve ; Polosky, Mark

Author_Institution

Sandia Nat. Labs., Albuquerque, NM, USA

fYear

2000

fDate

2000

Firstpage

51

Lastpage

52

Abstract

Summary form only given. Several applications of microelectromechanical systems (MEMS) require handling of large optical powers. One specific example includes steering or switching of an optical beam onto a photovoltaic device. In this way MEMS can be remotely powered with an incident high power optical beam. Photovoltaic cells integrated with MEMS can then convert the optical energy into electrical energy necessary to power the MEMS. In this paper we describe the optical damage mechanisms, as well as means of extending the optical damage threshold in order to handle 1 W of continuous wave incident power in the near infrared regime

Keywords

integrated optoelectronics; micro-optics; micromechanical devices; mirrors; photovoltaic cells; 1 W; 890 nm; MEMS; continuous wave incident power; electrical energy; high optical power handling; incident high power optical beam; large optical power; microelectromechanical systems; near infrared regime; optical beam; optical beam steering; optical damage mechanisms; optical energy; optical switching; photovoltaic cell integration; photovoltaic device; pop-up microelectromechanical mirrors; remotely powered; Electron optics; Gold; Laboratories; Micromechanical devices; Mirrors; Optical beams; Optical design; Optical microscopy; Optical sensors; Scanning electron microscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS, 2000 IEEE/LEOS International Conference on

Conference_Location

Kauai, HI

Print_ISBN

0-7803-6257-8

Type

conf

DOI

10.1109/OMEMS.2000.879622

Filename

879622