Stroboscopic interferometer with variable magnification to measure dynamics in an adaptive-optics micromirror

Author

Rembe, Christian ; Hart, Matthew ; Helmbrecht, Michael A. ; Srinivasan, Uthara ; Muller, Richard S. ; Lau, Kam Y. ; Howe, Roger T.

Author_Institution

Berkeley Sensor & Actuator Center, California Univ., CA, USA

fYear

2000

fDate

2000

Firstpage

73

Lastpage

74

Abstract

Interferometry has proven a powerful tool to measure out-of-plane movements in MEMS with high accuracy, In this paper, we demonstrate a setup for stroboscopic interferometry that combines the precise data registration obtained by combining phase-shifting techniques with the high spatial resolution and aperture that are characteristic for an optical microscope

Keywords

adaptive optics; displacement measurement; light interferometers; light interferometry; micro-optics; microactuators; mirrors; motion measurement; optical deflectors; optical microscopes; optical microscopy; optical testing; stroboscopes; MEMS out-of-plane movements measurement; adaptive-optics micromirror; bimorph actuators; high aperture; high spatial resolution; micromirror flatness; phase-shifting techniques; precise data registration; strobed-interferometric microscope; stroboscopic interferometer; time-dependent deflection; variable magnification; Actuators; High speed optical techniques; Laser beams; Micromechanical devices; Micromirrors; Mirrors; Optical interferometry; Optical polarization; Optical sensors; Phase shifting interferometry;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS, 2000 IEEE/LEOS International Conference on

Conference_Location

Kauai, HI

Print_ISBN

0-7803-6257-8

Type

conf

DOI

10.1109/OMEMS.2000.879632

Filename

879632