Tunable VCSEL with integrated heater and planar waveguide wavelength monitor

Author

Blau, G. ; Gale, M.T. ; Söchtig, J. ; Zscholle, Ch. ; Hövel, R. ; Gulden, K.

Author_Institution

Centre Suisse d´´Electronique et de Microtechnique SA, Zurich, Switzerland

fYear

2000

fDate

2000

Firstpage

83

Lastpage

84

Abstract

A compact solution for tuning and monitoring the emission waveguide of a single mode VCSEL (λ=760 nm) at constant output power is presented. The key element within the micro system is a chirped grating waveguide coupler combined with a diffractive collimating lens and a two-segment detector. The resulting wavelength measurement resolution of the chip is in the range of 0.06 nm

Keywords

diffraction gratings; diffractive optical elements; laser tuning; laser variables measurement; microlenses; optical couplers; optical fabrication; optical planar waveguides; replica techniques; surface emitting lasers; 760 nm; DOE; UV embossing; chirped grating waveguide coupler; constant output power; corrugated gratings; diffractive collimating lens; direct laser writing; integrated heater; optical microsystems; organically modified ceramics; planar waveguide wavelength monitor; replication; single mode VCSEL; tunable VCSEL; two-segment detector; wavelength measurement resolution; Chirp; Cogeneration; Collimators; Detectors; Diffraction gratings; Lenses; Monitoring; Planar waveguides; Power generation; Vertical cavity surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS, 2000 IEEE/LEOS International Conference on

Conference_Location

Kauai, HI

Print_ISBN

0-7803-6257-8

Type

conf

DOI

10.1109/OMEMS.2000.879637

Filename

879637