Measurement of MEMS mechanical parameters by injection interferometry

Author

Donati, S. ; Nogia, M. ; Lodi, V. Annovazzi ; Merlo, S.

Author_Institution

Dipt. di Elettronica, Pavia Univ., Italy

fYear

2000

fDate

2000

Firstpage

89

Lastpage

90

Abstract

In testing MEMS and MOEMS, one can use the direct observation of the device under a microscope and the functionality test in the intended mode of operation. A new diagnostic tool, also useful since the initial design phases, is presented in this paper. It is based on injection interferometry and provides the actual amplitude of displacement and related parameters, e.g. the maximum frequency of operation and the mechanical quality-factor of the structure. We present the basic idea and the measurements (vibration amplitude, resonant frequency, Q and hysteresis effects) performed on a MEMS gyro structure with the aid of the injection interferometer

Keywords

Q-factor measurement; frequency response; gyroscopes; hysteresis; light interferometry; micro-optics; micromechanical devices; micromechanical resonators; optical testing; vibration measurement; MEMS testing; MOEMS testing; displacement amplitude; frequency response; gyro structure; hysteresis effects; incipient creep; injection interferometry; maximum frequency of operation; mechanical parameters measurement; mechanical quality-factor; optical phase shift; resonant frequency; vibration amplitude; Frequency measurement; Hysteresis; Interferometry; Mechanical variables measurement; Micromechanical devices; Microscopy; Q measurement; Resonant frequency; Testing; Vibration measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS, 2000 IEEE/LEOS International Conference on

Conference_Location

Kauai, HI

Print_ISBN

0-7803-6257-8

Type

conf

DOI

10.1109/OMEMS.2000.879640

Filename

879640