Title :
Parallel-plate MEMS mirror design for large on-resonance displacement
Author :
Bhalotra, S.R. ; Mansell, J.D. ; Kung, H.L. ; Miller, D.A.B.
Author_Institution :
Edward L. Ginzton Lab., Stanford Univ., CA, USA
Abstract :
We present an electrostatically actuated MEMS mirror with 65 μm of displacement. This design provides a 2 mm square reflective surface and allows for easy fabrication, making it suitable for a wide range of applications
Keywords :
electrostatic actuators; micro-optics; micromachining; mirrors; optical fabrication; 2 mm; easy fabrication; electrostatically actuated; large on-resonance displacement; large range of motion; micromachining; parallel-plate MEMS mirror design; reflective surface; Adaptive optics; Electrodes; Electrostatics; Fabrication; Magnetic resonance; Micromechanical devices; Mirrors; Silicon; Springs; Voltage;
Conference_Titel :
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-6257-8
DOI :
10.1109/OMEMS.2000.879642
