DocumentCode
2571872
Title
Parallel-plate MEMS mirror design for large on-resonance displacement
Author
Bhalotra, S.R. ; Mansell, J.D. ; Kung, H.L. ; Miller, D.A.B.
Author_Institution
Edward L. Ginzton Lab., Stanford Univ., CA, USA
fYear
2000
fDate
2000
Firstpage
93
Lastpage
94
Abstract
We present an electrostatically actuated MEMS mirror with 65 μm of displacement. This design provides a 2 mm square reflective surface and allows for easy fabrication, making it suitable for a wide range of applications
Keywords
electrostatic actuators; micro-optics; micromachining; mirrors; optical fabrication; 2 mm; easy fabrication; electrostatically actuated; large on-resonance displacement; large range of motion; micromachining; parallel-plate MEMS mirror design; reflective surface; Adaptive optics; Electrodes; Electrostatics; Fabrication; Magnetic resonance; Micromechanical devices; Mirrors; Silicon; Springs; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location
Kauai, HI
Print_ISBN
0-7803-6257-8
Type
conf
DOI
10.1109/OMEMS.2000.879642
Filename
879642
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