Title :
Design, fabrication and packaging of micro-optical components and systems
Author :
Kopola, Harri ; Hiltunen, Jussi ; Hakkila, Jonna ; Karioja, Pentti ; Kololnoma, T. ; Karkkainen, Ari ; Paaso, Janne ; Rantala, Juha T.
Author_Institution :
VTT Electron. & Infotech Oulu, Finland
Abstract :
The system design concept of a multi-technological module is introduced. A direct patternable hybrid material is demonstrated with a diffractive axicon lens. First experimental results of a 527 nm microcavity organic LED are shown. Fabrication and packaging solutions of several optical and optoelectronic microsystems are presented
Keywords :
integrated optics; light emitting diodes; micro-optics; microlenses; micromachining; modules; optical fabrication; photolithography; semiconductor device packaging; diffractive axicon lens; direct lithographic writing; direct patternable hybrid material; fabrication; micro-optical components; microcavity organic LED; micromachining; multi-technological module; optical microsystems; optoelectronic microsystems; packaging solutions; system design concept; system-on-a-package based module; Electronics packaging; Fabrication; Fiber lasers; Microoptics; Optical coupling; Optical materials; Optical receivers; Optical signal processing; Optical transmitters; Virtual manufacturing;
Conference_Titel :
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-6257-8
DOI :
10.1109/OMEMS.2000.879648
