Directly patternable thick film hybrid glass materials for micro-opto-mechanical structures

Author

Rantala, J.T. ; Juuso, S. ; Levy, R. ; Kivimäki, L. ; Descour, M.R.

Author_Institution

VTT Electron. & Infotech Oulu, Finland

fYear

2000

fDate

2000

Firstpage

111

Lastpage

112

Abstract

The liquid phase deposition and direct UV writing method is applied for the fabrication of optical and mechanical structures into a photosensitive hybrid glass material. High optical quality thick films and structures are fabricated for the realization of a micro-optical table

Keywords

liquid phase deposited coatings; liquid phase deposition; micro-optics; micromachining; optical fabrication; optical films; optical glass; polymerisation; spin coating; ultraviolet lithography; bulk micromachining; direct UV writing; directly patternable materials; free radical polymerisation; high optical quality thick films; liquid phase deposition; lithographic patterning; micro-optical table; micro-opto-mechanical structures; organic functional properties; passive alignment; photosensitive hybrid glass material; ring-opening polymerisation; spin coating; thick film hybrid glass materials; Apertures; Glass; Optical device fabrication; Optical films; Optical materials; Optical refraction; Optical scattering; Optical surface waves; Polymer films; Thick films;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS, 2000 IEEE/LEOS International Conference on

Conference_Location

Kauai, HI

Print_ISBN

0-7803-6257-8

Type

conf

DOI

10.1109/OMEMS.2000.879651

Filename

879651