DocumentCode
2572033
Title
Torsional mirror with an electrostatically driven lever-mechanism
Author
Lin, Hung-Yi ; Fang, Weileun
Author_Institution
Dept. of Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
fYear
2000
fDate
2000
Firstpage
113
Lastpage
114
Abstract
This report proposes a novel torsional mirror. The optical performance of the torsional mirror is improved through the refining of the mechanical design. SEM shows the design of the torsional mirror containing a mirror plate and its driving mechanism-the electrostatic torque generator. Hence, the scanning angle of the mirror is magnified by torque generators. In addition, the scanning frequency of the mirror can reach 17.7 kHz, and the stiffness of the mirror plate is remarkably increased by the folded frame
Keywords
electrostatic actuators; micro-optics; micromachining; mirrors; optical control; optical fabrication; optical scanners; torque; torsion; SEM; electrostatic torque generator; electrostatically driven lever-mechanism; folded frame; frequency response; magnified scanning angle; micromachining; mirror design; mirror plate; optical performance; scanning frequency; torsional mirror; Actuators; Electrodes; Electrostatics; Frequency; Mirrors; Optical design; Optical films; Torque; Transistors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location
Kauai, HI
Print_ISBN
0-7803-6257-8
Type
conf
DOI
10.1109/OMEMS.2000.879652
Filename
879652
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