Title :
Torsional mirror with an electrostatically driven lever-mechanism
Author :
Lin, Hung-Yi ; Fang, Weileun
Author_Institution :
Dept. of Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
Abstract :
This report proposes a novel torsional mirror. The optical performance of the torsional mirror is improved through the refining of the mechanical design. SEM shows the design of the torsional mirror containing a mirror plate and its driving mechanism-the electrostatic torque generator. Hence, the scanning angle of the mirror is magnified by torque generators. In addition, the scanning frequency of the mirror can reach 17.7 kHz, and the stiffness of the mirror plate is remarkably increased by the folded frame
Keywords :
electrostatic actuators; micro-optics; micromachining; mirrors; optical control; optical fabrication; optical scanners; torque; torsion; SEM; electrostatic torque generator; electrostatically driven lever-mechanism; folded frame; frequency response; magnified scanning angle; micromachining; mirror design; mirror plate; optical performance; scanning frequency; torsional mirror; Actuators; Electrodes; Electrostatics; Frequency; Mirrors; Optical design; Optical films; Torque; Transistors; Voltage;
Conference_Titel :
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-6257-8
DOI :
10.1109/OMEMS.2000.879652
