DocumentCode
2572141
Title
Photoplott based masking alternatives for use in micromechanics, microoptics and microelectronics
Author
Dumbrávescu, N. ; Dascalu, E.
Author_Institution
Nat. Inst. for R&D in Microtechnologies, Bucharest, Romania
Volume
2
fYear
2002
fDate
2002
Firstpage
335
Abstract
This paper reports on different ways to use photoplot type films in the field of microtechnologies. Three such possibilities are presented below: direct contact masking; reticles for projection objectives (1:5 and 1:10); mask fabrication based on scale reduction of a photoplot type film.
Keywords
laser printers; masks; micro-optics; micromachining; plotters; reticles; direct contact masking; laser photoplotting; mask fabrication; microelectronics; micromachining; micromechanics; microoptics; microtechnologies; photoplot type film scale reduction; photoplot-based masking technology; projection objective reticles; Bellows; Design automation; Image resolution; Microelectronics; Microoptics; Optical device fabrication; Optical films; Page description languages; Printers; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2002. CAS 2002 Proceedings. International
Print_ISBN
0-7803-7440-1
Type
conf
DOI
10.1109/SMICND.2002.1105862
Filename
1105862
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