Optical MEMS for infrared gas sensors

Author

Bernstein, R.W. ; Ferber, Alain ; Johansen, Inge ; Moe, S.T. ; Rogne, H. ; Wang, D.T.

Author_Institution

SINTEF Electron. & Cybernetics, Oslo

fYear

2000

fDate

2000

Firstpage

137

Lastpage

138

Abstract

The NEXUS market analysis for microsystems 1996-2000 states that a large growth in the market for microsystems for environmental monitoring is expected. One important product is reliable low cost gas sensors. IR absorption systems are attractive for this application, because of their excellent reliability, selectivity, and sensitivity. However, high production costs have limited the widespread use of these systems. In this paper, we present key components for IR gas sensors based on optical microsystem technology. This includes a micromachined silicon infrared source and a highly specific photoacoustic gas detector

Keywords

air pollution measurement; gas sensors; infrared sources; micro-optics; micromachining; microsensors; optical sensors; photoacoustic spectroscopy; spectrochemical analysis; IR absorption; Si; bulk micromachining; environmental monitoring; infrared gas sensors; micromachined silicon infrared source; optical MEMS; photoacoustic gas detector; resistively heated membrane; Costs; Electromagnetic wave absorption; Gas detectors; Infrared sensors; Micromechanical devices; Monitoring; Optical devices; Optical sensors; Production systems; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS, 2000 IEEE/LEOS International Conference on

Conference_Location

Kauai, HI

Print_ISBN

0-7803-6257-8

Type

conf

DOI

10.1109/OMEMS.2000.879663

Filename

879663