Title :
Fiber-optic accelerometer with micro-optical shutter modulation and integrated damping
Author :
Guldimann, B. ; Clerc, P.-A. ; de Rooij, N.F.
Author_Institution :
Inst. of Microtechnol., Neuchatel Univ., Switzerland
Abstract :
A single mask, shutter modulated fiber-optic accelerometer with integrated squeeze film damping structures has been fabricated and characterized. Its mass suspended by four beams and containing the structures for squeeze film damping is displaced laterally under acceleration. Vertical shutters at both ends of the mass can move horizontally in the optical path between two self-aligned multimode optical fibers
Keywords :
accelerometers; damping; fibre optic sensors; frequency response; integrated optics; intensity modulation; micro-optics; micromachining; optical fabrication; optical modulation; photolithography; SOI wafer; deep RIE; differential detection; dynamic range; fiber-optic accelerometer; four beams suspended mass; frequency response; integrated damping; lateral displacement; micro-optical shutter modulation; photolithography; self-aligned multimode optical fibers; single mask; squeeze film damping; vertical shutters; Acceleration; Accelerometers; Damping; Intensity modulation; Optical coupling; Optical fiber sensors; Optical fibers; Optical films; Optical modulation; Optical sensors;
Conference_Titel :
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-6257-8
DOI :
10.1109/OMEMS.2000.879665
