Title :
Free space optical components and systems based on LIGA technology
Author_Institution :
Inst. fur Mikrostrukturtech., Forschungszentrum Karlsruhe, Germany
Abstract :
Due to its characteristics, LIGA technology is well suited to build up free space optical components with hybrid integration of optical elements by passive alignment. This is demonstrated by passive optical components and electro-opto-mechanical devices for telecommunication and sensor application
Keywords :
LIGA; micro-optics; microlenses; micromachining; mirrors; optical communication equipment; optical fabrication; optical planar waveguides; optical switches; LIGA technology; double mirror; electro-opto-mechanical devices; free space optical components; heterodyne receiver; hybrid integration; micro-optical benches; micromachining; microspectrometer; passive alignment; passive optical components; switching matrix; Integrated optics; Optical devices; Optical fiber devices; Optical fiber polarization; Optical filters; Optical mixing; Optical polymers; Optical receivers; Optical sensors; Space technology;
Conference_Titel :
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location :
Kauai, HI
Print_ISBN :
0-7803-6257-8
DOI :
10.1109/OMEMS.2000.879668
