The Parameter Dependency of Induction Coil in Cylindrical ICP Lamp

Summary form only given. In this paper, we designed a cylindrical type light source that had an electromagnetic principle of inductively coupled plasma, and measured its electrical-optical properties. Using the principle of the transformer, electrically equivalent circuit of cylindrical type light source was analyzed. According to the parameters of electromagnetic induction which were diameter of coil with Phi0.3~1.2 mm, number of turns with 4~12 turns, distance with 40~120 mm and RF power with 10~150 W, the electrical and optical properties were measured. When the diameter of the coil was Phi0.3 mm, number of turns was 8 turns and distance was 40 mm, the highest brightness of 29,730 cd/m² was shown with RF power 150 W. The relationship between electromagnetic induction and plasma discharges was demonstrated using the mode transition from E-mode to H-mode.