Title :
High-selectivity single-chip spectrometer for operation at visible wavelengths
Author :
Correia, J.H. ; Bartek, M. ; Wolffenbuttel, R.F.
Abstract :
A micro-spectrometer has been realized based on an array of Fabry-Perot thin-film optical resonators. The 16 channel micro-spectrometer is IC fabrication compatible and operates in the visible spectral range with an inter-channel shift of 6 nm. Each of the channels is sensitive in a single peak with FWHM of 16 nm. A FWHM <2 nm and finesse of 40 for narrowband operation is demonstrated.
Keywords :
Fabry-Perot resonators; micro-optics; optical arrays; optical films; visible spectrometers; Fabry-Perot thin-film optical resonator array; IC fabrication; micro-spectrometer; selectivity; single-chip visible spectrometer; Fabrication; Fabry-Perot; Instruments; Mirrors; Optical arrays; Optical filters; Optical resonators; Photodiodes; Silver; Spectroscopy;
Conference_Titel :
Electron Devices Meeting, 1998. IEDM '98. Technical Digest., International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-4774-9
DOI :
10.1109/IEDM.1998.746399
