Title :
Characteristics of the Plasma Impedance Probe with Applied DC Bias
Author :
Blackwell, D.D. ; Messer, S.J. ; Walker, D.N. ; Amatucci, W.E.
Author_Institution :
SFA Inc., Landover, MD
Abstract :
Summary form only given. The impedance of a small spherical probe immersed in a uniform plasma is measured by recording the reflection coefficient of an applied signal using a network analyzer. This impedance has a resonance at the plasma frequency where the imaginary part goes to zero, a feature that has made this measurement a good way of determining electron density. When the sphere is biased negatively with respect to the plasma potential a second resonance occurs at omega<omegap due to the depleted electron density in the sheath around the probe. A greatly increased power deposition occurs at this lower resonance, whose frequency can be controlled by changing the sheath width using a DC bias. As the bias is increased the value of this frequency becomes smaller until the resonance disappears completely at Vprobe=Vplasma. As the bias is further increased past the plasma potential an electron sheath forms with its own resonance which is at a lower frequency than the resonance associated with the ion sheath. The impedance of the electron sheath can be approximated using the Llewellyn-Peterson formulas for a space charge limited diode. As with the ion sheath resonance, the largest energy deposition occurs at the lower of the two frequencies.
Keywords :
plasma density; plasma probes; plasma sheaths; electron density; electron sheath; energy deposition; ion sheath; network analyzer; plasma frequency; plasma impedance probe; plasma potential; power deposition; reflection coefficient; space charge limited diode; Electrons; Impedance measurement; Plasma density; Plasma measurements; Plasma properties; Plasma sheaths; Probes; Reflection; Resonance; Resonant frequency;
Conference_Titel :
Plasma Science, 2005. ICOPS '05. IEEE Conference Record - Abstracts. IEEE International Conference on
Conference_Location :
Monterey, CA
Print_ISBN :
0-7803-9300-7
DOI :
10.1109/PLASMA.2005.359501