Backside laserprober characterization of thermal effects during high current stress in smart power ESD protection devices

Author

Furbock, C. ; Seliger, N. ; Pogany, D. ; Litzenberger, M. ; Gornik, E. ; Stecher, M. ; Gosser, H. ; Werner, W.

Author_Institution

Inst. for Solid State Electron., TV Vienna, Austria

fYear

1998

fDate

6-9 Dec. 1998

Firstpage

691

Lastpage

694

Abstract

We present a study of thermal effects in Smart Power Electrostatic Discharge (ESD) protection structures by application of a noninvasive infrared backside laserprober technique. The temperature increase in the device active area is obtained from the time resolved measurements of optical phase changes under ESD-like high current stress. Results of temperature distribution and thermal dynamics for different device operation modes are presented.

Keywords

electrostatic discharge; light interferometry; measurement by laser beam; power integrated circuits; protection; temperature distribution; temperature measurement; ESD protection device; current stress; light interferometry; noninvasive infrared backside laser probe; smart power; temperature distribution; thermal dynamics; time resolved measurement; Area measurement; Current measurement; Electrostatic discharge; Electrostatic measurements; Laser modes; Phase measurement; Power lasers; Protection; Stress measurement; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1998. IEDM '98. Technical Digest., International

Conference_Location

San Francisco, CA, USA

ISSN

0163-1918

Print_ISBN

0-7803-4774-9

Type

conf

DOI

10.1109/IEDM.1998.746451

Filename

746451