An efficient 3-dimensional CAD tool for field-emission devices

Author

Yao-Joe Yang ; Korsmeyer, F.T. ; Rabinovich, V. ; Meng Ding ; Senturia, S.D. ; Akinwande, A.I.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA, USA

fYear

1998

fDate

6-9 Dec. 1998

Firstpage

863

Lastpage

866

Abstract

An efficient 3-D numerical tool for modeling and simulating field-emission devices (FED) is presented. This tool uses an accelerated boundary-element-method (BEM) electrostatics solver and an adaptive explicit integration method. The typical CPU time for a complete electrostatics and trajectory simulation is less than 1 hour, versus a few hours/days for 3-D finite-element-methods (FEM). The simulated results of a single-gate field emitter array (FEA) are in excellent agreement with experimental results. Simulation examples of proximity focusing FEDs and integrated-focus-electrode (IFE) focusing FEDs are also presented. The results provide good guidelines for device design and operation.

Keywords

CAD; boundary-elements methods; electron field emission; field emission displays; vacuum microelectronics; IFE focusing FED; adaptive integration; boundary element method; electrostatic simulation; field emission device; field emitter array; integrated focus electrode; numerical model; proximity focusing FED; three-dimensional CAD tool; Acceleration; Computational modeling; Computer simulation; Electrostatics; Field emitter arrays; Finite element methods; Laboratories; Numerical models; Physics; Sparse matrices;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1998. IEDM '98. Technical Digest., International

Conference_Location

San Francisco, CA, USA

ISSN

0163-1918

Print_ISBN

0-7803-4774-9

Type

conf

DOI

10.1109/IEDM.1998.746491

Filename

746491