• DocumentCode
    2576388
  • Title

    Overview Of Microelectromechanical Systems And Design Processes

  • Author

    Tang, William C.

  • Author_Institution
    MEMS Technology Group Jet Propulsion Laboratory Pasadena, California 91109-8099
  • fYear
    1997
  • fDate
    9-13 June 1997
  • Firstpage
    670
  • Lastpage
    673
  • Keywords
    Design automation; Microelectromechanical devices; Microelectromechanical systems; Micromachining; Micromechanical devices; Permission; Predictive models; Process design; Robustness; Solid modeling;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design Automation Conference, 1997. Proceedings of the 34th
  • Conference_Location
    Anaheim, CA, USA
  • ISSN
    0738-100X
  • Print_ISBN
    0-7803-4093-0
  • Type

    conf

  • DOI
    10.1109/DAC.1997.597229
  • Filename
    597229
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2576388