Title :
High-Q optical filter based on photonic crystal surface-mode microcavity
Author :
Wang, Jing ; Qiu, Min
Author_Institution :
Dept. of Microelectron. & Inf. Technol., R. Inst. of Technol., Kista
Abstract :
An optical filter based on a side-coupled two-dimensional photonic crystal surface mode cavity on crystalline silicon-on-insulator (SOI) structure is presented. The measured system Q and intrinsic Q factor are 6900 and 13700, respectively.
Keywords :
Q-factor; microcavities; optical fabrication; optical filters; optical materials; photonic crystals; silicon-on-insulator; Q optical filter fabrication; Si-SiO2; crystalline silicon-on-insulator structure; intrinsic Q factor measurement; side-coupled two-dimensional photonic crystal; surface-mode microcavity; Couplers; Gold; Gratings; Microcavities; Optical filters; Optical surface waves; Optical waveguides; Photonic crystals; Resists; Silicon;
Conference_Titel :
IEEE/LEOS Winter Topicals Meeting Series, 2009
Conference_Location :
Innsbruck
Print_ISBN :
978-1-4244-2610-2
Electronic_ISBN :
978-1-4244-2611-9
DOI :
10.1109/LEOSWT.2009.4771635
