Title :
Patterning of photonic quasi-crystals on GaN LEDs
Author :
Khokhar, Ali Z. ; Macintyre, Douglas S. ; Rahman, Faiz ; De La Rue, Richard M. ; Johnson, Nigel P. ; Charlton, Martin ; Watson, Ian M. ; Xiong, Chang ; Kelm, Pawel ; Zhang, Haoxiang ; Gu, Erdan ; Dawson, Martin D.
Author_Institution :
Dept. of Electron. & Electr. Eng., Univ. of Glasgow, Glasgow
Abstract :
The fabrication of 2-dimensional (2D) photonic quasi crystals (PQCs) on gallium nitride (GaN) light emitting diodes (LEDs) is described. Fabrication was achieved using electron beam lithography (EBL) and, separately, by nano-imprint lithography (NIL).
Keywords :
III-V semiconductors; electron beam lithography; gallium compounds; light emitting diodes; nanolithography; nanopatterning; photonic crystals; 2D photonic quasicrystals; LEDs; electron beam lithography; epitaxial structures; nano-imprint lithography; Dry etching; Electrons; Fabrication; Gallium nitride; Light emitting diodes; Lighting control; Liquid crystal displays; Lithography; Photonic crystals; Resists;
Conference_Titel :
IEEE/LEOS Winter Topicals Meeting Series, 2009
Conference_Location :
Innsbruck
Print_ISBN :
978-1-4244-2610-2
Electronic_ISBN :
978-1-4244-2611-9
DOI :
10.1109/LEOSWT.2009.4771652
