Soft micromanipulation device with multiple degrees of freedom consisting of high polymer gel actuators

Author

Tadokoro, S. ; Yamagami, S. ; Ozawa, M. ; Kimura, T. ; Takamori, T. ; Oguro, K.

Author_Institution

Dept. of Comput. & Syst. Eng., Kobe Univ., Japan

fYear

1999

fDate

21-21 Jan. 1999

Firstpage

37

Lastpage

42

Abstract

Dexterity and softness of micromanipulators are important issues in assembly of fragile complex microstructures. This paper presents micromanipulator devices with 3 and 6 degrees of freedom intended for soft dextrous motion. The 3-DOF device moved 2 mm at the maximum with a response of 13 Hz. Experiments of microscopic teleoperation proved that the device was suitable for dynamic micromotion. The 6-DOF device could control 3 translations and 3 rotations independently. The practical frequency range was up to 3 Hz, the maximum displacement was 0.4 mm, and the maximum rotation angle was 2 deg.

Keywords

dexterous manipulators; gels; intelligent actuators; microassembling; micromachining; micromanipulators; polymer electrolytes; polymer films; telerobotics; 3-DOF device; 6-DOF device; bimorph actuator; dynamic micromotion; fragile complex microstructure assembly; frequency response; gray-box model; high polymer gel actuators; ionic conducting polymer gel film; microscopic teleoperation; multiple degrees of freedom; nonequilibrium swelling; rotations control; soft dextrous motion; soft micromanipulation device; step response; translations control; Actuators; Assembly systems; Etching; Impedance; Micromanipulators; Microstructure; Polymer films; Polymer gels; Silicon; Systems engineering and theory;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth IEEE International Conference on

Conference_Location

Orlando, FL, USA

ISSN

1084-6999

Print_ISBN

0-7803-5194-0

Type

conf

DOI

10.1109/MEMSYS.1999.746748

Filename

746748