Two-dimensional micro conveyer with integrated electrostatic actuators

In this paper, we present a two-dimensional micro-conveyer that utilizes electrostatic force. This conveyer with integrated electrostatic actuators is able to convey an object weighing several milligrams with high precision. The actuators are 350/spl times/350 /spl mu/m/sup 2/ in area and are constructed from support beams, an oscillating mass and a conveyance tip above the mass. The actuators are fabricated by a process consisting of the steps of photoresist and photosensitive polyimide lithography, electroplating, and a photoresist sacrificial layer process. The maximum horizontal displacement was 0.2 /spl mu/m at the maximum vertical displacement of 6.7 /spl mu/m with a drive frequency of 10 Hz and applied voltage of 300 V. A silicon chip of 1.4/spl times/1.4 mm in area and 1.4 mg of weight can be conveyed in a two-dimensional direction.