Title :
High quality factor silicon nitride microdisk resonators for chip-scale visible sensing
Author :
Hosseini, Ehsan Shah ; Yegnanarayanan, Siva ; Adibi, Ali
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA
Abstract :
Ultra-high-quality (Q>4times106) microdisk resonators are demonstrated in a Si3N4 platform at 655 nm with straight and curved in-plane coupling waveguides. Selective coupling to specific radial orders and polarizations is demonstrated by phase-matching. TM modes show higher sensitivity to environmental modifications for sensing.
Keywords :
Q-factor; light polarisation; micro-optomechanical devices; micromechanical resonators; optical fabrication; optical phase matching; optical planar waveguides; optical resonators; optical sensors; silicon compounds; SiN3; TM mode; chip-scale visible sensing; curved in-plane coupling waveguide; environmental modification; high-QF silicon nitride microdisk resonator; light polarization; optical phase-matching; specific radial order; wavelength 655 nm; Etching; Optical coupling; Optical frequency conversion; Optical materials; Optical refraction; Optical resonators; Optical sensors; Optical waveguides; Q factor; Silicon; (130.3120) Integrated optics devices; (230.5750) Resonators;
Conference_Titel :
IEEE/LEOS Winter Topicals Meeting Series, 2009
Conference_Location :
Innsbruck
Print_ISBN :
978-1-4244-2610-2
Electronic_ISBN :
978-1-4244-2611-9
DOI :
10.1109/LEOSWT.2009.4771669
