DocumentCode :
2577352
Title :
Realization and characterization of magnetic media deposited on side edge of patterned silicon dot arrays
Author :
Landis, S. ; Bayle, P. ; Rodmacq, B. ; Baltz, V. ; Dieny, Bernard
Author_Institution :
CEA, Grenoble, France
fYear :
2003
fDate :
29-31 Oct. 2003
Firstpage :
60
Lastpage :
61
Abstract :
Magnetic materials were deposited by sputtering onto patterned arrays of silicon dots. Structural characterizations (i.e. AFM and TEM observations) have been performed on (Co/Pt) multilayers deposited on line arrays. The MFM image reveals that only the side-walls of dots which are covered by pure cobalt and magnetic. Moreover, they present a bipolar or a single pole contrast which suggest that this technique could be used for the fabrication of high density storage media.
Keywords :
atomic force microscopy; cobalt; ferromagnetic materials; magnetic disc storage; magnetic force microscopy; magnetic multilayers; platinum; sputter deposition; transmission electron microscopy; AFM; Co-Pt; Co/Pt multilayers; MFM; Si; TEM; cobalt; magnetic media; patterned silicon dot arrays; single pole contrast; sputtering; Chromium; Fabrication; Magnetic flux; Magnetic force microscopy; Magnetic materials; Magnetic separation; Material storage; Nonhomogeneous media; Silicon; US Department of Transportation;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-040-2
Type :
conf
DOI :
10.1109/IMNC.2003.1268518
Filename :
1268518
Link To Document :
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