Title :
Sub-wavelength imaging of optical modes on silicon microdisk cavities using a near-field probing technique
Author :
Eftekhar, Ali Asghar ; Soltani, Mohammad ; Yegnanarayanan, Siva ; Adibi, Ali
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA
Abstract :
We demonstrate sub-wavelength near-field imaging of the optical modes in high Q silicon microdisks. Mode profiles with a spatial resolution of ~20 nm are obtained by characterizing the perturbative effects of a small scanning AFM tip.
Keywords :
atomic force microscopy; elemental semiconductors; image resolution; micro-optomechanical devices; microcavities; micromechanical resonators; near-field scanning optical microscopy; optical resonators; silicon; Si; atomic force microscopy; microdisk resonators; mode profiles; near-field probing technique; optical modes; perturbative effects; scanning AFM tip; silicon microdisk cavity; spatial resolution; sub-wavelength imaging; Nonlinear optics; Optical coupling; Optical imaging; Optical resonators; Optical scattering; Optical sensors; Optical surface waves; Optical waveguides; Resonance; Silicon; (130.3120) Integrated optics devices; (180.4243) Near-field microscopy;
Conference_Titel :
IEEE/LEOS Winter Topicals Meeting Series, 2009
Conference_Location :
Innsbruck
Print_ISBN :
978-1-4244-2610-2
Electronic_ISBN :
978-1-4244-2611-9
DOI :
10.1109/LEOSWT.2009.4771672
