DocumentCode
2577478
Title
Spectral infrared absorption of CMOS thin film stacks
Author
Schneeberger, N. ; Paul, O. ; Baltes, H.
Author_Institution
Lab. of Phys. Electron., Eidgenossische Tech. Hochschule, Zurich, Switzerland
fYear
1999
fDate
21-21 Jan. 1999
Firstpage
106
Lastpage
111
Abstract
We report the measurement of the relative spectral infrared absorptance of a complete set of CMOS thin film stacks. The measurements were made in the spectrum from 2 /spl mu/m to 14.6 /spl mu/m. The thin film stacks are used in micromachined thermal infrared sensors. The presented data allow more precise modeling of these sensors.
Keywords
CMOS digital integrated circuits; CMOS image sensors; infrared detectors; optical variables measurement; 1 mum; 2 to 14.6 mum; CMOS thin film stacks; micromachined thermal infrared sensors; modeling; relative spectral infrared absorptance; spectral infrared absorption; CMOS technology; Electromagnetic wave absorption; Filters; Gratings; Infrared sensors; Infrared spectra; Optical device fabrication; Testing; Transistors; Wavelength measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth IEEE International Conference on
Conference_Location
Orlando, FL, USA
ISSN
1084-6999
Print_ISBN
0-7803-5194-0
Type
conf
DOI
10.1109/MEMSYS.1999.746780
Filename
746780
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