• DocumentCode
    2577514
  • Title

    Fabrication of integrated carbon nanotube field emitter with extraction electrode

  • Author

    Oota, S. ; Kawata, H. ; Yasuda, M. ; Pan, L. ; Akita, S. ; Nakayama, Y.

  • Author_Institution
    Osaka Prefecture Univ., Sakai, Japan
  • fYear
    2003
  • fDate
    29-31 Oct. 2003
  • Firstpage
    78
  • Lastpage
    79
  • Abstract
    In this report an integrated carbon nanotube field emitter with an extraction gate electrode in one wafer is presented. A simple process is presented for the integrated CNT field emitter fabrication by use of the selective growth of CNT between Cr and Si surface.
  • Keywords
    carbon nanotubes; chemical vapour deposition; chromium; electrodes; field emitter arrays; silicon; C-Cr-Si; Cr surface; Si surface; gate electrode; integrated CNT field emitter; integrated carbon nanotube field emitter; wafer; Carbon nanotubes; Chromium; Electrodes; Etching; Fabrication; Helium; Iron alloys; Plasma applications; Plasma devices; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
  • Conference_Location
    Tokyo, Japan
  • Print_ISBN
    4-89114-040-2
  • Type

    conf

  • DOI
    10.1109/IMNC.2003.1268527
  • Filename
    1268527
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2577514