Three-dimensional sound intensity measurements using Microflown particle velocity sensors

Author

de Bree, H.-E. ; Druyvesteyn, W.F. ; Berenschot, E. ; Elwenspoek, M.

Author_Institution

Micromech. Transducers Group, Twente Univ., Enschede, Netherlands

fYear

1999

fDate

21-21 Jan. 1999

Firstpage

124

Lastpage

129

Abstract

This paper reports on a novel method to measure three-dimensional sound intensity and the fabrication of a miniature three-dimensional sound intensity probe. Verifying measurements where performed with three separate micromachined particle velocity probes and one pressure microphone. A three-dimensional sound intensity probe has been realised based on a three-dimensional micromachined particle velocity microphone, a 3D Microflown, and a miniature pressure microphone.

Keywords

acoustic intensity measurement; flowmeters; micromachining; microphones; microsensors; 3D Microflown; 3D sound intensity measurements; Microflown particle velocity sensors; SNR; mass flow sensor; micromachined particle velocity probes; miniature 3D sound intensity probe; miniature probe; near-field measurement; pressure microphone; resistive temperature sensors; through-the-wafer etching; Acoustic measurements; Acoustic sensors; Energy measurement; Microphones; Particle measurements; Performance evaluation; Pressure measurement; Probes; Temperature sensors; Velocity measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth IEEE International Conference on

Conference_Location

Orlando, FL, USA

ISSN

1084-6999

Print_ISBN

0-7803-5194-0

Type

conf

DOI

10.1109/MEMSYS.1999.746785

Filename

746785