Title :
High pressure check valve for application in a miniature cryogenic sorption cooler
Author :
Burger, J.F. ; van der Wekken, M.C. ; Berenschot, E. ; Holland, H.J. ; ter Brake, H.J.M. ; Rogalla, H. ; Gardeniers, J.G.E. ; Elwenspoek, M.
Author_Institution :
MESA Res. Inst., Twente Univ., Enschede, Netherlands
Abstract :
This paper presents a check valve with integrated filter that can stand gas pressures of more than 100 bar in the closed direction and which has a very low pressure drop at low absolute gas pressures in the forward direction. The check valve is designed as a part of a check valve unit for application In a miniature cooler for cryogenic temperatures (<120 K). This cooling system, which utilizes several micromachined components, will in this paper be introduced to the MEMS field.
Keywords :
high-pressure techniques; micromachining; microvalves; refrigeration; sorption; 100 bar; 120 K; MEMS system; high pressure check valve; integrated filter; micromachining; miniature cryogenic sorption cooler; Compressors; Cryogenics; Electronics cooling; Energy efficiency; Micromechanical devices; Power system reliability; Refrigeration; Refrigerators; Temperature distribution; Valves;
Conference_Titel :
Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth IEEE International Conference on
Conference_Location :
Orlando, FL, USA
Print_ISBN :
0-7803-5194-0
DOI :
10.1109/MEMSYS.1999.746803
