Re-configurable fluid circuits by PDMS elastomer micromachining

Author

Armani, D. ; Liu, C. ; Aluru, N.

Author_Institution

Microelectron. Lab., Illinois Univ., Urbana, IL, USA

fYear

1999

fDate

21-21 Jan. 1999

Firstpage

222

Lastpage

227

Abstract

We report on a microfabrication technique for realizing re-configurable micro fluidics devices using polymethylsiloxane material (PDMS). The mechanical characteristics of the material, including the Young´s modulus and the adhesion energy have been determined experimentally. The magnitude of Young´s modulus ranges from 8.7/spl times/10/sup 5/ Pa to 3.6/spl times/10/sup 5/ Pa. The adhesion energy is a function of the PDMS composition as well as chemical treatment. A method for efficiently developing flow interconnects has been demonstrated.

Keywords

Young´s modulus; adhesion; elastomers; microfluidics; micromachining; moulding; PDMS composition; PDMS elastomer; Young´s modulus; adhesion energy; chemical treatment; flow interconnects; mechanical characteristics; micro molding; microfabrication technique; microfluidics; micromachining; polydimethylsiloxane; reconfigurable fluid circuits; Adhesives; Biological materials; Bonding; Chemicals; Circuits; Connectors; Fabrication; Fluidics; Micromachining; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth IEEE International Conference on

Conference_Location

Orlando, FL, USA

ISSN

1084-6999

Print_ISBN

0-7803-5194-0

Type

conf

DOI

10.1109/MEMSYS.1999.746817

Filename

746817