Title :
Hermeticity Investigation of MEMS Vacuum Packaging
Author :
Lin, Dong ; Gan, Zhiyin ; Wang, Xuefang ; Wang, Chenggang ; Zhang, Honghai ; Liu, Sheng
Author_Institution :
Wuhan Nat. Lab. for Optoelectron., Huazhong Univ. of Sci. & Technol., Wuhan
Abstract :
The vacuum packaging is one of the most difficult problems to solve in the MEMS. In the MEMS vacuum packaging, the most important quality standard is the leak rate, which determines the vacuum maintaining in the vacuum packages. This paper presents two methods together to measure the leak rate. The authors also study the effect of extending the dwell time on the measured leak rate. The results of the relationship between measured leak rate and real leak rate is investigated
Keywords :
hermetic seals; micromechanical devices; MEMS; dwell time effect; hermetic packaging; leak rate; vacuum packaging; Detectors; Electronics packaging; Gallium nitride; Helium; Leak detection; Mass spectroscopy; Micromechanical devices; Testing; Vacuum technology; Weapons;
Conference_Titel :
Electronic Packaging Technology, 2006. ICEPT '06. 7th International Conference on
Conference_Location :
Shanghai
Print_ISBN :
1-4244-0619-6
Electronic_ISBN :
1-4244-0620-X
DOI :
10.1109/ICEPT.2006.359660
