Simple modeling and simulation of the squeeze film effect and transient response of the MEMS device

In this paper, the novel theoretical squeeze film equations of infinitely long and rectangular parallel plates system, which are applicable for large displacement simulation, are derived. The simple simulation method by using these equations is developed. A silicon-micromachined test device like an accelerometer was fabricated and the transient responses of the device were measured. The simulation was also carried out by using the simple model. The simulated and experimental results were compared, and they have good agreement. This method makes it easy to make the model and the simulation, and is useful at the beginning of the design of MEMS devices affected by the squeeze film effect.