Title :
Self-generated light emitting device using micromachined Si mirror arrays
Author :
Byeong-Kwon Ju ; Yun-Hi Lee ; Myung-Hwan Oh
Author_Institution :
Div. of Electron. & Inf. Technol., Korea Inst. of Sci. & Technol., Seoul, South Korea
Abstract :
In this work, we fabricated tip-shaped Si reflector arrays which are conventionally studied for the electron emitter in FED field and report preliminary results of light emission observed by TFEL structure with the Si reflector. As a result, 3600 reflectors was formed within one pixel and these picture elements create a well concentrated visible light around the point reflectors under the bipolar pulse excitation.
Keywords :
elemental semiconductors; light emitting devices; micro-optics; micromachining; mirrors; optical arrays; optical fabrication; silicon; Si; Si mirror array; electron emitter; fabrication; field emission display; micromachining; self-generated light emitting device; thin film electroluminescent device; tip-shaped reflector; Brightness; Electrodes; Electron guns; Etching; Field emitter arrays; Mirrors; Optical arrays; Optical propagation; Thin film devices; Zinc compounds;
Conference_Titel :
Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth IEEE International Conference on
Conference_Location :
Orlando, FL, USA
Print_ISBN :
0-7803-5194-0
DOI :
10.1109/MEMSYS.1999.746857
