Title :
Comparison between BAW and SAW sensor principles
Author :
Benes, E. ; Gröschl, M. ; Seifert, F. ; Pohl, A.
Author_Institution :
Inst. fur Allgemeine Phys., Univ. of Technol., Vienna, Austria
Abstract :
A comparison between piezoelectrically excited Bulk Acoustic Wave (BAW) and Surface Acoustic Wave (SAW) elements with respect to their primary sensitivity functions and principal capabilities for sensor applications is given. The importance of mode-purity for high dynamic range sensors is emphasized. Characteristic sensor examples are reviewed and the special demands on the electronics for BAW and SAW elements in the sensor field are described (e.g. cable problem, wireless SAW sensors). For a fair evaluation a performance figure SQ, defined as the product of reduced sensitivity S and resonator Q-value, is introduced. Finally, the potential of alternative piezoelectric materials for future sensor developments is briefly discussed
Keywords :
biosensors; bulk acoustic wave devices; chemical sensors; crystal resonators; electric sensing devices; pressure transducers; surface acoustic wave sensors; thermometers; BAW sensor; biosensor; cable; chemosensor; crystal resonators; delay lines; force transducer; mode-purity; performance figure SQ; piezoelectric materials; piezoelectrically excited bulk acoustic wave devices; pressure transducer; reduced sensitivity; resonator Q-value; stress transducer; surface acoustic wave devices; thermometer; viscoelastic layer parameter monitor; wireless SAW sensors; Acoustic sensors; Acoustic waves; Current measurement; Dynamic range; Electric variables measurement; Frequency measurement; Resonance; Sensor phenomena and characterization; Surface acoustic waves; Temperature sensors;
Conference_Titel :
Frequency Control Symposium, 1997., Proceedings of the 1997 IEEE International
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-3728-X
DOI :
10.1109/FREQ.1997.638514
