Design, fabrication and measurement of CNT based ISFET for NANO devices

In recent years, there has been increasing interest in monitoring and controlling of pH. It has become an important aspect of many industrial wastewater treatment processes. At the same time, the demand for smaller electronic devices used for various industrial and commercial applications has greatly increased. Micro and nano materials, such as Carbon Nanotubes (CNTs) are known for their excellent electrical and mechanical properties, as well as for their small size, therefore they are good candidates to manufacture micro or nano electronic devices. These devices can be used for pH control. However, this cannot be achieved unless CNTs with metallic or semiconducting band structures can be successfully deposited and separated. In these processes, microchip fabrication and deposition of CNTs using Dielectrophoresis are involved. An Atomic Force Microscope is used to test the conductivity of Single-Walled Carbon Nanotubes with a conductive cantilever-tip. The resistance and the I-V characteristics of the carbon nanotube can be obtained to describe its electrical properties. Ultimately, this technological development will lead towards the efficient and effective manufacturing of CNT-based ISFET for pH sensor application.