Title :
VHF free-free beam high-Q micromechanical resonators
Author :
Kun Wang ; Yinglei Yu ; Ark-Chew Wong ; Nguyen, C.T.-C.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Abstract :
Free-free beam, flexural-mode, micromechanical resonators utilizing non-intrusive supports to achieve measured Q´s as high as 8,400 at VHF frequencies from 30-90 MHz are demonstrated in a polysilicon surface micromachining technology. The subject microresonators feature torsional-mode support springs that effectively isolate the resonator beam from its anchors via quarter-wavelength impedance transformations, minimizing anchor dissipation and allowing these resonators to achieve high Q with high stiffness in the VHF frequency range.
Keywords :
Q-factor; VHF devices; elemental semiconductors; micromachining; micromechanical resonators; silicon; 30 to 90 MHz; Q-factor; Si; VHF free-free beam micromechanical resonator; anchor dissipation; flexural mode; polysilicon surface micromachining; quarter-wavelength impedance transformation; stiffness; torsional mode support; Capacitors; Electric variables measurement; Electrodes; Frequency measurement; Isolation technology; Microcavities; Micromachining; Micromechanical devices; Springs; VHF circuits;
Conference_Titel :
Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth IEEE International Conference on
Conference_Location :
Orlando, FL, USA
Print_ISBN :
0-7803-5194-0
DOI :
10.1109/MEMSYS.1999.746871
