Title :
Effects of the Einzel lens structure in microcolumn
Author :
Kim, Y.C. ; Kim, D.W. ; Ahn, S.J. ; Choi, S.K. ; Kim, D.Y. ; Kim, H.S.
Author_Institution :
Dept. of Phys., Sun Moon Univ., Chungnam, South Korea
Abstract :
In this paper, the result of simulation analyses on the influence of Einzel lens thickness and the focusing voltage on its operation is discussed in detail.
Keywords :
electron beam focusing; electron beam lithography; electron lenses; electron optics; Einzel lens structure; Einzel lens thickness; electron beam focusing; electron beam lithography; electron lenses; electron optics; focusing voltage; microcolumn; Analytical models; Apertures; Electrodes; Electron beams; Electronic mail; Lenses; Moon; Physics; Sun; Voltage;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-040-2
DOI :
10.1109/IMNC.2003.1268594
